| 发明名称 |
METHOD FOR REGISTRATION OF HELICON RESONANCE IN SEMICONDUCTOR MATERIALS |
| 摘要 |
Method for registration of helicon resonance in semiconductor materials relates to non-destructive methods of control of substance and can be used for contact-less measurement of parameters of semiconductor materials. |
| 申请公布号 |
UA53585(U) |
申请公布日期 |
2010.10.11 |
| 申请号 |
UA20100004574U |
申请日期 |
2010.04.19 |
| 申请人 |
YURII FEDKOVYCH CHERNIVTSI NATIONAL UNIVERSITY |
发明人 |
KHANDOZHKO OLEKSANDR HRYHOROVYCH;LASTIVKA HALYNA IVANIVNA;VERYHA ANDRII DMYTROVYCH |
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