APPARATUS FOR MANUFACTURING SUBSTRATE HAVING VERTICALLY STACTED PROCESS CHAMBERS

摘要

PURPOSE: A substrate manufacturing device including a process chamber of a laminated structure is provided to reduce an area that the substrate manufacturing device occupies, thereby efficiently using a work space in a manufacturing site. CONSTITUTION: A plurality of process chambers(110,120,130) is supported by a chamber frame(140). The process chambers are laminated. A plurality of load lock chambers(210,220,230) is respectively connected to the sides of the process chambers. A cassette(310) is located on the sides of the load lock chambers. The cassette loads a substrate(600). A substrate tray carries the substrate between the load lock chambers and the process chambers. A robot arm(320) carries the substrate between the load lock chambers and the cassette.