发明名称 |
COATING APPARATUS AND TEST COATING METHOD |
摘要 |
<p>PURPOSE: A coating apparatus and a test coating method are provided to prevent the insertion of flowable materials into the lower side of a tape through the end portion at the main scanning direction of the tape. CONSTITUTION: A coating apparatus comprises the following: a stage to put on a substrate; a nozzle extruding flowable materials to the upper side of the substrate; a transporting unit moving the nozzle to the main scanning direction along to the upper side of the stage; and a test coating unit spreading the flowable materials extruded from the nozzle. The test coating unit includes a tape(712) including a test coating surface to coat the flowable materials, and a curving unit(716) to curve the tape.</p> |
申请公布号 |
KR20100109856(A) |
申请公布日期 |
2010.10.11 |
申请号 |
KR20100028399 |
申请日期 |
2010.03.30 |
申请人 |
DAI NIPPON SCREEN MFG. CO., LTD. |
发明人 |
ABE MAKOTO |
分类号 |
B05C5/00;B05C11/00;H01L51/50;H05B33/10 |
主分类号 |
B05C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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