发明名称 COATING APPARATUS AND TEST COATING METHOD
摘要 <p>PURPOSE: A coating apparatus and a test coating method are provided to prevent the insertion of flowable materials into the lower side of a tape through the end portion at the main scanning direction of the tape. CONSTITUTION: A coating apparatus comprises the following: a stage to put on a substrate; a nozzle extruding flowable materials to the upper side of the substrate; a transporting unit moving the nozzle to the main scanning direction along to the upper side of the stage; and a test coating unit spreading the flowable materials extruded from the nozzle. The test coating unit includes a tape(712) including a test coating surface to coat the flowable materials, and a curving unit(716) to curve the tape.</p>
申请公布号 KR20100109856(A) 申请公布日期 2010.10.11
申请号 KR20100028399 申请日期 2010.03.30
申请人 DAI NIPPON SCREEN MFG. CO., LTD. 发明人 ABE MAKOTO
分类号 B05C5/00;B05C11/00;H01L51/50;H05B33/10 主分类号 B05C5/00
代理机构 代理人
主权项
地址