| 摘要 |
PURPOSE: A table for transmitted light is provided to reduce the breakage of a substrate regardless of the pressurization of processing tools by contacting the entire rear surface of the substrate on the upper side of a top-table. CONSTITUTION: A table for transmitted light includes infrared light source, a metal-based sub-table(12), and a top-table(20). A driving unit is attached on the lower side of the sub-table. A table loading surface is formed on the upper side of the sub-table. The top-table is placed on the sub-table. The upper side, the lower side, and the lateral side are prepared for the top-table. The top table is composed of an infrared transmitting material.
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