| 摘要 |
PURPOSE: An electromagnetic field shielding layer for a PDP(Plasma Display Panel) and a manufacturing method thereof are provided to improve durability, corrosion resistance, and reliability by using a NiCr thin film as a protection thin film. CONSTITUTION: A high refraction thin film, a metal thin film, and a protection thin film are successively deposited on a substrate. The deposition of the high refraction thin film, the metal thin film, and the protection thin film are repeated once or more. A deposition process is performed by a medium frequency AC magnetron sputtering. The protective thin film is an ITO or NiCr film. The thickness of the protection thin film is 1 to 20 nm. The metal thin film is a silver film. The thickness of the metal thin film is 10 to 20 nm.
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