| 摘要 |
<p>PURPOSE: A ceramic heater and a method of manufacturing thereof are provided to increase the evenness of temperature over a heating face by suppressing the resistance change of a resistance heating body. CONSTITUTION: A ceramic heater(10) comprises gas(12), a first resistance heating body(14), and a second resistance heating body(16). The gas is an aluminum nitride sintered body containing a component from yttrium oxide. A first projection pattern and second projection pattern are reflected on the heating surface of the gas, and are inserted into grooves(30a,30b) which are formed an outer layer(30).</p> |
