METHOD AND SYSTEM FOR COMPENSATING THERMALLY INDUCED MOTION OF PROBE CARDS,申请号KR20097015519-传众专利搜索

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发明名称	METHOD AND SYSTEM FOR COMPENSATING THERMALLY INDUCED MOTION OF PROBE CARDS
摘要
申请公布号	KR100986105(B1)	申请公布日期	2010.10.08
申请号	KR20097015519	申请日期	2002.11.01
申请人		发明人
分类号	H01L21/66;G01R1/073;G01R31/28	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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