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经营范围
发明名称
Probe Unit and Inspection Apparatus
摘要
申请公布号
KR100986640(B1)
申请公布日期
2010.10.08
申请号
KR20080032098
申请日期
2008.04.07
申请人
发明人
分类号
H01L21/66;G01R1/073
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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