A ETCHING COMPOSITION FOR ALUMINIUM-DOPED ZINC OXIDE ALLOY LAYER

摘要

PURPOSE: An etchant composition for an aluminum-doped zinc oxide alloy layer is provided to improve the fabrication efficiency of a flat panel display by simple processes and to improve etching property by preventing residue after etching. CONSTITUTION: An etchant composition for an aluminum-doped zinc oxide alloy layer comprises organic acid 0.1~20wt.%, sugar alcohols 0.01~5wt.%, and the residual water.