METHOD FOR MANUFACTURING A SUBSTRARE HAVING CONCAVO-CONVEX ACTIVESTRUCTURE

摘要

PURPOSE: A method for manufacturing a substrate with an uneven structure is provided to efficiently remove residue on an uneven part of a substrate by simultaneously cleaning the surface of the substrate with a chemical method and a physical method. CONSTITUTION: An uneven part(110) is formed by texturing the surface of a substrate(100). The residue(R) generated in a texturing process is chemically and physically removed. The substrate with the uneven part is chemically etched. The substrate with the uneven part is thermally processed.