| 摘要 |
PURPOSE: A substrate processing device and a substrate transferring method are provided to smoothly execute the return of a substrate within a substrate processing device. CONSTITUTION: A substrate processing device and a substrate transferring method include a substrate handling part, a waiting tool, a delivering apparatus, a first transport apparatus, and a second transport apparatus. The substrate handling part is arranged along a carrier way(C1). The waiting tool is movably installed along the carrier way and waits the substrate. The delivering apparatus is movably installed along the carrier way and returns the substrate between the waiting tool and each substrate handling part. The first transport apparatus transfers the delivering apparatus along the carrier way. The second transport apparatus transfers the waiting tool along the carrier way.
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