发明名称 CLEANING DEVICE FOR ORGANO-MINERAL COMPOSITE
摘要 PURPOSE: An organic and inorganic complex cleaning device is provided to remove organic and inorganic materials by removing the inorganic materials using a dry ultrasonic wave after removing the organic materials using steam. CONSTITUTION: A high pressure steam cleaning unit(20) dissolves organic materials by spraying the steam with high pressure. An ultrasonic cleaning unit(30) removes inorganic materials by spraying purified dry air including an ultrasonic wave to an object. The ultrasonic cleaning unit includes a blower(31) which pressurizes the purified dry air, an ultrasonic spraying unit(32), and an air suctioning unit(33). The blower pressurizes the purified dry air. A collection circulating unit(40) collects the moisture from the surface of the object and circulates the moisture in the high pressure steam cleaning unit.
申请公布号 KR20100108731(A) 申请公布日期 2010.10.08
申请号 KR20090026892 申请日期 2009.03.30
申请人 DOE. CO., LTD. 发明人 KIM, SE HO
分类号 H01L21/302;H01L21/304 主分类号 H01L21/302
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