| 摘要 |
PROBLEM TO BE SOLVED: To provide a fan filter unit capable of improving fan efficiency and reducing suction noise by straightening sucked air current. SOLUTION: A suction opening 1 is formed at an upper part of a chamber 5, a fan unit 4 is disposed in the chamber 5, a filter 6 is disposed at a downstream side of the fan unit 4, and a suction auxiliary duct 9 projecting to a suction side is mounted at an upper part of a suction plate 8 of the suction opening, thus the fan filter unit capable of limiting the sucked air current, reducing a resisting component of the fan 2, improving the fan efficiency, and reducing noise due to collision of air current can be obtained. COPYRIGHT: (C)2011,JPO&INPIT |
