| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for processing a high homogeneous small diameter glass material, in which the high homogeneous small diameter glass material free from the occurrence of chipping or crack during processing is obtained by reducing the residue of thermal distortion. SOLUTION: In the method for processing the high homogeneous small diameter glass material, a small diameter quartz glass preform 1 having ≤9 inch diameter is heated to make transparent and after that, is shaped by grinding-machining after cooled. In such a case, the quartz glass preform 1 is heated by a heater 12 using a zone melting furnace 11 while moving the quartz glass preform 1 so that the peak temperature of the zone melting furnace 11 is set to a temperature at which the glass structure in the quartz glass preform 1 is mitigated and the in-plane distribution of the virtual temperature is made uniform and after that, quickly cooled. By reducing the residue of the thermal distortion in this way, the high homogeneous small diameter glass material free from the occurrence of chipping or crack in machining is obtained. COPYRIGHT: (C)2011,JPO&INPIT
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