| 发明名称 |
DIELECTRIC FILM AND LAYER TESTING |
| 摘要 |
A system for testing and a method for making a semiconductor device is disclosed. A preferred embodiment includes a conductor overlying a dielectric layer. The conductor is coupled to a first test pad via a first conducting line and to a second test pad via a second conducting line.
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| 申请公布号 |
US2010253380(A1) |
申请公布日期 |
2010.10.07 |
| 申请号 |
US20090418843 |
申请日期 |
2009.04.06 |
| 申请人 |
MARTIN ANDREAS;RYDEN KARL-HENRIK;MITCHELL ANDREA |
发明人 |
MARTIN ANDREAS;RYDEN KARL-HENRIK;MITCHELL ANDREA |
| 分类号 |
G01R31/02;G01R31/26;H01L21/66 |
主分类号 |
G01R31/02 |
| 代理机构 |
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