CARBON NANOTUBE CONTACT STRUCTURES FOR USE WITH SEMICONDUCTOR DIES AND OTHER ELECTRONIC DEVICES
摘要
A method of making carbon nanotube contact structures on an electronic device includes growing a plurality of carbon nanotube columns on a mandrel. Electrically-conductive adhesive is applied to ends of the columns distal from the mandrel, and the columns are transferred to the electronic device. An electrically-conductive material is deposited onto some or all of the columns. The mandrel can be reused to grow a second plurality of carbon nanotube columns.
申请公布号
WO2010115171(A2)
申请公布日期
2010.10.07
申请号
WO2010US29877
申请日期
2010.04.03
申请人
FORMFACTOR, INC.;GRITTERS, JOHN K.;MARTENS, RODNEY, I.;YAGLIOGLU, ONNIK
发明人
GRITTERS, JOHN K.;MARTENS, RODNEY, I.;YAGLIOGLU, ONNIK