发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING SAME |
摘要 |
<p>A semiconductor device having a planarization layer that is comprised by an inorganic film and formed with recesses at regions where a conductive film is disposed. A first contact hole running through at least an interlayer insulating film is formed on a first interconnect layer, while a second contact hole running through at least the interlayer insulating film is formed on the conductive film in a manner which has the second contact hole passing through the inward side of a recess.</p> |
申请公布号 |
WO2010113229(A1) |
申请公布日期 |
2010.10.07 |
申请号 |
WO2009JP06368 |
申请日期 |
2009.11.25 |
申请人 |
SHARP KABUSHIKI KAISHA;NAKAZAWA, MAKOTO;MIYAMOTO, MITSUNOBU |
发明人 |
NAKAZAWA, MAKOTO;MIYAMOTO, MITSUNOBU |
分类号 |
H01L21/768;G09F9/30;H01L21/28;H01L21/336;H01L29/417;H01L29/786 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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