| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond thin film structure having sufficiently low density of lamination defects and threading dislocations, and to provide a production method of the same. SOLUTION: The diamond thin film structure comprises a substrate 101, a masking material 102 covering a part of the principal orientation plane of the substrate 101, and a diamond thin film 103 epitaxially growing from the surface of the principal orientation plane of the substrate 101, wherein the diamond thin film 103 is formed on the masking material 102, and the crystal orientation of the diamond thin film 103 is aligned with the crystal orientation of the substrate 101. A threading dislocation 104a present in the diamond substrate 101 passes through the principal orientation plane of the diamond substrate 101 in a part not covered with the masking material 102 to reach the diamond thin film 103, however, propagation of a threading dislocations 104b to the diamond thin film 103 is blocked by the masking material 102. Therefore, the density of threading dislocations in the diamond thin film 103 is decreased to improve crystallinity. COPYRIGHT: (C)2011,JPO&INPIT
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