| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion source, compact and light-weight, with high stability and long life. SOLUTION: The ion source 100 has a discharge tube 102 made of a dielectric for generating plasma 101 arranged in penetration of a waveguide 104 connected to a microwave oscillator 103. Draw-out electrodes 107a, 107b are provided for drawing out ion beams 106 from the plasma 101. Further, permanent magnets 109, 110 are arranged at both faces of the waveguide 104 penetrated by the discharge tube 102, both of them magnetically connected to each other with a ferromagnetic member 111. Moreover, a fan 114 is provided at a terminal end of the waveguide 104, and is so structured to be able to directly cool the discharge tube 102 with an air stream. COPYRIGHT: (C)2011,JPO&INPIT |
