| 摘要 |
PROBLEM TO BE SOLVED: To reuse coolant for polishing a glass substrate by effectively removing and separating foreign matter, such as glass powder mixed with coolant after completion of a polishing process. SOLUTION: This method is for separating foreign matter in coolant, which separates foreign matter from the coolant supplied in between the glass substrate and a polishing pad in a polishing process of a glass substrate. The coolant discharged after completion of the polishing process is charged into a centrifugal separator, and the centrifugal separator is driven to give a predetermined centrifugal force to the coolant, thus separating foreign matter from the coolant. COPYRIGHT: (C)2011,JPO&INPIT
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