| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and device for generation of induction heat plasma, capable of generating heat plasma by applying higher pressure or smaller coil voltage than a conventional art. <P>SOLUTION: A resonance capacitor 36 is connected only with a part between an end 26a of a secondary side coil of a matching transformer 26 and an end 22a of an induction coil 22. Thereby, heat plasma is generated by supplying high-frequency power to the induction coil through an impedance matching circuit 34 having a biased capacity so as to have a ratio with a predetermined value or more between the end 22a side and the other end side 22b of the induction coil 22 at least at ignition of heat plasma. <P>COPYRIGHT: (C)2011,JPO&INPIT |
