| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To uniformize the cross sectional shape of a reforming region formed inside a workpiece. <P>SOLUTION: The optical axis of a laser beam 14 is inclined with respect to the upper face 1a of the workpiece 1 on which a laser beam 14 is made incident. Consequently, the longitudinal direction of the reforming region 19 can be inclined with respect to the z axis direction vertical to the upper face 1a of the workpiece. Also, the length of the z axis direction of the reforming region 19 can be shortened. As a result, for example, when forming a first reforming region row composed of a plurality of reforming regions 19 arrayed along the z axis direction and a second reforming region row composed of a plurality of reforming regions 19 arrayed along the x axis direction, inside the workpiece 1, it is possible to reduce a difference between the width in the x axis direction of the first reforming region row and the width in the z axis direction of the second reforming region row. Accordingly, the cross sectional shape of the reforming region row comprising the plurality of reforming regions 19 formed inside the workpiece 1 can be made more uniform. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
