VERFAHREN ZUM BEFESTIGEN EINER MIKROMESCHANISCHEN VORRICHTUNG AN EINEM VERTEILKANAL UND DANACH ERHALTENE FLÜSSIGKEITSVERTEILEINRICHTUNG

摘要

A method of attaching a micromechanical fluid control device to a substrate includes the steps of forming a first ring of a first adhesive around an aperture defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.