| 摘要 |
<p>An interferometer comprises an interference profile measuring instrument which generates light having of which the phase has changed in accordance with the depth of a stage by reflecting the light from a light source emitting broadband light while changing the reflection distance in stages, receives the combined light configured from the light reflected from an object to be measured which is obtained by irradiating the object with the broadband light and the comb light generated from an optical path length modulator, and measures the interference profile. Since the interferometer (1) has no movable scanning mechanism and does not require calculation of Fourier transform, or the like, the interference profile can be measured in a short time and a cross-sectional image, a one-dimensional section in the depth direction or a two-dimensional section in the depth direction can be measured.</p> |
