Verfahren zur Herstellung von Licht emittierenden Elementen mit organischen Verbindungen

摘要

The invention relates to an apparatus and a method for the manufacture of light emitting elements comprising organic compounds. These elements are provided with organic light emitting diodes and can be displays or also lighting elements having such light emitting diodes. It is the object of the invention to reduce the effort for the manufacture with respect to the costs and to the time effort. In this connection, already pretreated substrates are further processed in a continuous vacuum coating plant. An electrode is formed on such a substrate and at least one layer of an organic compound which is suitable for the emission of light should be deposited over said electrode. The deposition should take place with different angular distributions. Shadow masks are used for this purpose. The adaptation of the angular distribution in the deposition can take place by varying the spacing of the shadow mask from the substrate and/or of the base pressure of sources for the deposition of the top electrode and of the organic layer(s).