| 摘要 |
PROBLEM TO BE SOLVED: To reduce heat generated from a light source in a spectroscopic ellipsometer, and accurately obtain a polarization state of a reflection light from an object. SOLUTION: In the spectroscopic ellipsometer 1, light is guided from the light source 31 to a substrate 9 through a polarizer 321. The reflection light from the substrate 9 is received by a spectroscope 42 through a rotating analyzer 41. The polarization state of the reflection light is obtained. In the spectroscopic ellipsometer 1, since the light source 31 for emitting and converting a pulse light from a semiconductor light emitting element into pulse light having a continuous spectrum is utilized, the heat generated from the light source 31 is reduced. As a result, a thermal expansion of an optical element disposed between the light source 31 and the substrate 9 is suppressed. The polarization state of the reflection light from the substrate 9 is accurately be obtained. Since spectral intensity is correctly obtained when a rotational position of the analyzer 41 is at a desired angle, the polarization state of the reflection light from the substrate 9 is accurately obtained. COPYRIGHT: (C)2011,JPO&INPIT
|
