发明名称 AGENT FOR REMOVING CONDUCTIVE FILM AND METHOD FOR REMOVING CONDUCTIVE FILM
摘要 Disclosed is an agent for removing a conductive film, which contains: an acid having a boiling point of not less than 80°C, a base having a boiling point of not less than 80°C, or a compound that generates an acid or a base by the action of an external energy; a solvent; a resin; and a leveling agent. Also disclosed is a method for removing a conductive film, which uses the agent for removing a conductive film. The agent for removing a conductive film and the method for removing a conductive film are capable of in-plane uniformly removing a desired portion of a conductive film.
申请公布号 WO2010113744(A1) 申请公布日期 2010.10.07
申请号 WO2010JP55178 申请日期 2010.03.25
申请人 TORAY INDUSTRIES, INC.;SEKIGUCHI, HIROKI;MATA, JUNJI 发明人 SEKIGUCHI, HIROKI;MATA, JUNJI
分类号 C09K13/04;C09K13/02;C09K13/06;H01B13/00;H01J11/02;H01L21/306;H05K3/06 主分类号 C09K13/04
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