发明名称 |
AGENT FOR REMOVING CONDUCTIVE FILM AND METHOD FOR REMOVING CONDUCTIVE FILM |
摘要 |
Disclosed is an agent for removing a conductive film, which contains: an acid having a boiling point of not less than 80°C, a base having a boiling point of not less than 80°C, or a compound that generates an acid or a base by the action of an external energy; a solvent; a resin; and a leveling agent. Also disclosed is a method for removing a conductive film, which uses the agent for removing a conductive film. The agent for removing a conductive film and the method for removing a conductive film are capable of in-plane uniformly removing a desired portion of a conductive film. |
申请公布号 |
WO2010113744(A1) |
申请公布日期 |
2010.10.07 |
申请号 |
WO2010JP55178 |
申请日期 |
2010.03.25 |
申请人 |
TORAY INDUSTRIES, INC.;SEKIGUCHI, HIROKI;MATA, JUNJI |
发明人 |
SEKIGUCHI, HIROKI;MATA, JUNJI |
分类号 |
C09K13/04;C09K13/02;C09K13/06;H01B13/00;H01J11/02;H01L21/306;H05K3/06 |
主分类号 |
C09K13/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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