THREE-DIMENSIONAL SHAPE MEASURING DEVICE, THREE-DIMENSIONAL SHAPE MEASURING METHOD, AND THREE-DIMENSIONAL SHAPE MEASURING PROGRAM

摘要

Height that can be measured is easily extended while maintaining a measuring range. A three-dimensional shape measuring system for measuring the three-dimensional shape of an object to be measured by analyzing an optical pattern which is projected onto the object to be measured, and the luminance of which periodically varies with a position, wherein the object to be measured is mounted on a mount having a reference plane for the height of the object to be measured, a measuring head projects the optical pattern onto the object to be measured and the reference plane and captures the image, and a displacement section displaces the measuring head in the height direction. A phase calculation section (75) calculates the phase of the optical pattern in a certain pixel of the captured image, a height calculation section (77) calculates the height of the object to be measured on the basis of the calculated phase, and a feed ratio calculating section (78) calculates the amount to be displaced by the displacement section on the basis of the calculated height. The height calculation section (77) calculates the height on the basis of the phase calculated by the phase calculation section (75), and calculates the height of the object to be measured by correcting the calculated height on the basis of the amount of the displacement.