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发明名称
Temperature control method for chiller apparatus
摘要
申请公布号
KR100986253(B1)
申请公布日期
2010.10.07
申请号
KR20080075052
申请日期
2008.07.31
申请人
发明人
分类号
H01L23/38;H01L23/34;H01L23/36;H01L23/367
主分类号
H01L23/38
代理机构
代理人
主权项
地址
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