发明名称 PIEZOELECTRIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric device which has the support structure of an oscillating piece adaptive to downsizing of the piezoelectric device, and can secure high reliability. SOLUTION: The piezoelectric device 100 includes a package base 10 having a recessed portion 16 formed on an inside bottom surface 18, a support member 30 bonded to the package base 10 with an adhesive 17 provided in the recessed portion 16, a base 42 supported by the support member 30, and the oscillating piece 40 having an arm portion 44 extending from the base 42. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010226418(A) 申请公布日期 2010.10.07
申请号 JP20090071353 申请日期 2009.03.24
申请人 SEIKO EPSON CORP 发明人 ANZAI TATSUYA
分类号 H03H9/19;H03H9/02;H03H9/05;H03H9/10 主分类号 H03H9/19
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