摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which has the support structure of an oscillating piece adaptive to downsizing of the piezoelectric device, and can secure high reliability. SOLUTION: The piezoelectric device 100 includes a package base 10 having a recessed portion 16 formed on an inside bottom surface 18, a support member 30 bonded to the package base 10 with an adhesive 17 provided in the recessed portion 16, a base 42 supported by the support member 30, and the oscillating piece 40 having an arm portion 44 extending from the base 42. COPYRIGHT: (C)2011,JPO&INPIT
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