| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To shorten the time from the occurrence of a fault to dissolution. <P>SOLUTION: When a fault occurs in a substrate processing apparatus 2 and a fault coping file is prepared by a file preparing/updating part 18, the prepared fault coping file is uploaded to a fault countermeasure file server 4. Thus, the latest fault countermeasure file is preserved at all times in the fault coping file server 4, and the latest fault countermeasure file preserved in the fault countermeasure file server 4 is shared by all the substrate processing apparatuses 2 connected to the fault countermeasure file server 4. Then, by downloading the fault countermeasure file from the fault coping file server 4 to the respective substrate processing apparatuses 2, in the case where a fault occurs in the substrate apparatus 2, a user of the substrate processing apparatus 2 instantaneously acquires a countermeasure for the fault and dissolves the fault according to the countermeasure. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
