| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To stabilize flow rate control of a fluid flowing through a flow passage. <P>SOLUTION: A flow rate controller includes: a valve 41 for regulating an opening of the flow passage through which the fluid flows; a flow rate detection part 34 detecting a flow rate of the fluid; a valve drive part 53 performing pulse width modulation of a drive voltage to be supplied to the valve 41 based on the detection result by the flow rate detection part 34 and a value set for the flow rate; and control parts 57 and 71 correcting a pulse width of the pulse width modulation according to fluctuation in the drive voltage. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
