| 摘要 |
The invention relates to a method for producing a micromechanical component, comprising the following steps: arranging an electrode comb (50) in a mount (54, 56), wherein a first partial surface of the electrode comb (50) is arranged at a distance not equal to zero from a glass surface (58) of the mount (54, 56), and wherein the electrode comb (50) is connected to the mount (54, 56) via at least one connecting part arranged on a second partial surface of the electrode comb (50); applying a voltage between the first partial surface of the electrode comb (50) and the glass surface (58), with the result that the distance between the first partial surface of the electrode comb (50) and the glass surface (58) is reduced; and anodically fixedly bonding the first partial surface of the electrode comb (50) to the glass surface (58). The invention furthermore relates to a method for producing a micromechanical component, and to a micromechanical component. |
