EUV-Pellikel mit erhöhter EUV-Lichtdurchlässigkeit,申请号DE200711002735T-传众专利搜索

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发明名称	EUV-Pellikel mit erhöhter EUV-Lichtdurchlässigkeit
摘要
申请公布号	DE112007002735(B4)	申请公布日期	2010.10.07
申请号	DE200711002735T	申请日期	2007.11.09
申请人	ADVANCED MICRO DEVICES INC.	发明人	WOOD, OBERT REEVES II;RYOUNG-HAN, KIM;WALLOW, THOMAS
分类号	G03F1/14	主分类号	G03F1/14
代理机构		代理人
主权项
地址

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