| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of producing a liquid ejecting head that suppresses deterioration and destruction of a piezoelectric layer to improve piezoelectric characteristic with low energy, and to provide the liquid ejecting head, and a liquid ejecting device. <P>SOLUTION: The method is of producing the liquid ejecting head, which causes pressure changes in a pressure generating chamber communicating with a nozzle opening and has a piezoelectric element with a first electrode, a piezoelectric layer, and a second electrode. The piezoelectric layer has a perovskite structure and is preferentially aligned in a (100) plane. The method for producing the liquid ejecting head includes polarizing the piezoelectric layer by applying an electric field having energy higher than energy required for converting the polarization direction in the <111> direction to the <110> direction and lower than energy required for converting the polarization direction in the <111> direction to the <001> direction when the electric field to be applied to the piezoelectric layer is in the <001> direction vertical to a plane on which the second electrode is provided. <P>COPYRIGHT: (C)2011,JPO&INPIT |
