| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for safely managing both a method for measuring the concentration of ozone in a distillation process of a fluid containing ozone and the process. <P>SOLUTION: When distilling a system made of three components or more of ozone; oxygen; and another third fluid and containing at least one type or more of noble gas; tetrafluoromethane; or the like as the other component, a sample gas is derived via a route 31 in the vicinity of the bottom of a distillation column 12 (14) at which the concentration of ozone is maximum. By measuring oxygen generated by the complete decomposition of ozone in the sample gas by an ozone decomposition catalyst tube 32, it is possible to measure and obtain the concentration of ozone and to safely manage the distillation process. <P>COPYRIGHT: (C)2011,JPO&INPIT |
