发明名称 FIN STRUCTURES AND METHODS OF FABRICATING FIN STRUCTURES
摘要 There is provided fin structures and methods for fabricating fin structures. More specifically, fin structures are formed in a substrate. The fin structures may include two fins separated by a channel, wherein the fins may be employed as fins of a field effect transistor. The fin structures are formed below the upper surface of the substrate, and may be formed without utilizing a photolithographic mask to etch the fins.
申请公布号 US2010252886(A1) 申请公布日期 2010.10.07
申请号 US20100795495 申请日期 2010.06.07
申请人 MICRON TECHNOLOGY, INC. 发明人 TANG SANH D.;HALLER GORDON
分类号 H01L27/088;H01L21/28;H01L21/762 主分类号 H01L27/088
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