SILICON-CERAMIC COMPOSITE SUBSTRATE

摘要

The invention relates to a silicon-ceramic composite substrate (01), which comprises a low-temperature ceramic (02) having at least one pre-structured ceramic layer and a silicon substrate (03). According to the invention, the low-temperature ceramic (02) forms a carrier layer and the silicon substrate surface has nanostructures (06), which are completely penetrated into the low-temperature ceramic (02), in a contact area (04) with the carrier layer.