| 摘要 |
<p>Provided are a method and device for creating a composite image, which are capable of avoiding pattern deformation caused by multiple irradiation of electron beams when images which have been dividedly captured a plurality of times are subjected to panoramic composition. When a plurality of images are joined together into one image, the joint regions between the edges of two adjacent images are superimposed to generate the one image. Among the two adjacent images, the joint region of an image, the imaging order of which is earlier is left, and the joint region of an image, the imaging order of which is later is erased. In the joint region of the image, the imaging order of which is earlier, the irradiation number of electron beams is less in comparison with the joint region of the image, the imaging order of which is later, so that the pattern deformation caused by the irradiation of the electron beams is less.</p> |
