摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device capable of manufacturing the electronic device preventing the generation of a leakage in a through-electrode with a superior productivity, and to provide a method of manufacturing the electronic device. SOLUTION: The electronic device coats a connection between the through-electrode 5 and a connection wiring 4 with a protective film 23 for preventing the leakage. When manufacturing the electronic device, the projective film 23 is formed collectively by using the same material as a junction film 8 in a process forming the junction film 8 for joining a cover 9 with a substrate 2. Consequently, the process separately forming the projective film 23 is made unnecessary, and the productivity is improved. COPYRIGHT: (C)2011,JPO&INPIT
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