| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample analysis method and a sample analyzer capable of saving time and effort to change a standard sample, etc. by enabling quantitative analysis of an analytical objective element per standard sample using an analytical procedure hardly influenced by a chemical shift resulting from chemical bond condition. SOLUTION: In the sample analysis method, when a certain element in a sample 5 is quantitatively analyzed by irradiating the sample 5 with an electron beam 12 and detecting characteristic X-rays 13 generating from the sample 5, the quantitative analysis carried out on the basis of detection intensity of two or more L lines of the characteristic X-rays 13 corresponding to the element. COPYRIGHT: (C)2011,JPO&INPIT
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