| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor for heat treatment, which prevents cracks of a substrate in irradiating flash light, suppresses lateral slipping of the substrate, and is manufactured relatively easily. SOLUTION: The susceptor 72 mounted on a hot plate 71 includes a concave part 79 of a concave surface shape. A semiconductor wafer W is held inside the concave part 79. Six guide pins 75 are vertically arranged on the concave part 79. The six guide pins 75 are arranged so as to surround a periphery of the semiconductor wafer W. An upper surface of each guide pin 75 is a tapered surface with a gradientα5-30°. The guide pins 75 having such the tapered surface can prevent cracks and can suppress lateral slipping even when the semiconductor wafer W is thermally expanded rapidly in irradiating flash light. In addition, bar-like guide pins 75 are vertically arranged on the concave part 79 of constant curvature, and thus the susceptor 72 can be manufactured relatively easily. COPYRIGHT: (C)2011,JPO&INPIT |
