| 摘要 |
PROBLEM TO BE SOLVED: To shorten a period of time required for a degassing treatment for a shield plate after replacement with respect to a shield plate, a film deposition system and a method for manufacturing a magnetic recording medium. SOLUTION: The shield plate is exchangeably attached in a film deposition system and has a deposition surface on which a film deposition material scattering in the film deposition system is deposited. The shield plate includes: a plate-like member in which one of a couple of mutually opposing surfaces forms the deposition surface; a heater which is provided integrally on the plate-like member, and terminals electrically connected to the heater. COPYRIGHT: (C)2011,JPO&INPIT
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