| 摘要 |
Provided is a fluid device unit structure in which a chemical solution stagnation portion that is formed between a valve of a main fluid flow path and a branching point of a return flow path is minimized to cause hardly any solidification of a chemical solution. In the fluid device unit structure in which a plurality of fluid devices that are connected via flow paths are integrated on a base member (10) to form a single unit, and the main fluid flow path (11) and the return flow path (12) formed in the base member (10) are respectively provided with a first valve (20) and a second valve (40) for switching the flow paths, the branching inlet (12a) at which the return flow path (12) branches from the main fluid flow path (11) is close to the upstream side of the first valve (20).
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