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经营范围
发明名称
Eigenschaftsanalysegerät
摘要
申请公布号
DE112008003337(T5)
申请公布日期
2010.10.07
申请号
DE200811003337T
申请日期
2008.12.01
申请人
SHIBAURA MECHATRONICS CORP.
发明人
HAYASHI, YOSHINORI;WAKABA, HIROSHI;MIYAZONO, KOICHI;ONO, YOKO;MORI, HIDEKI
分类号
G01N21/956;G06T1/00;G06T7/00;H01L21/66
主分类号
G01N21/956
代理机构
代理人
主权项
地址
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