| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of suppressing deposition of dust of evaporated substance of a member to be irradiated with laser beams from an irradiated portion of the member, a molten stuff scattering from a vicinity of the irradiated portion thereof or the like due to re-deposition on the member. <P>SOLUTION: In the laser beam machining apparatus 1 comprising a pulse laser beam source 2, a local machining head 3 having a transparent aperture 38 with pulse laser beams L introduced therefrom, and a supporting stand 4 of a member 5 having irradiated portions by the pulse laser beams L, while the local machining head 3 is connected to exhaust means 32a and 32b to adjust the pressure and the air flow in a space formed between the supporting stand 4 and the local machining head 3, and a local exhaust means 34 to adjust the pressure and the air flow in a local exhaust unit 37 close to the transparent aperture and the irradiated portion, an aperture 39 of the local machining head 3 facing the irradiated portion to regulate the local exhaust unit 37 is selected to be substantially perfect circle having the minor diameter of≤2 mm. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
