| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining device and a method by which the incident position of a laser beam can be adjusted comparatively simply on the surface of a workpiece. <P>SOLUTION: The workpiece 5 is held on a soft object on a stage 4 containing the soft object 4b that deforms in accordance with an imparted pressure. A gas is blown against the surface of the workpiece held on the stage to deform the soft object 4b, thereby displacing the incident region of the laser beam within the surface of the workpiece 5, in the travelling direction of the laser beam. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
