发明名称 Reading circuit for a multi-axis MEMS gyroscope having detection directions inclined with respect to the reference axes, and corresponding multi-axis mems gyroscope
摘要 Described herein is a reading circuit (30, 30') for a multi-axis gyroscope (52) provided with a microelectromechanical structure (10) having reference axes (x, y), along which angular velocities (© x , © y ) to be detected act, and detection elements (22a-22d), which are sensitive in respective detection directions (x 1 , x 2 ) and generate respective detection quantities as a function of projections of the angular velocities in the detection directions; the reading circuit generates electrical output signals (OUT), each correlated to a respective one of the angular velocities, as a function of the detection quantities. A combination stage (32, 32') combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination (¦) of the detection directions with respect to the reference axes.
申请公布号 EP2236981(A1) 申请公布日期 2010.10.06
申请号 EP20090177154 申请日期 2009.11.26
申请人 STMICROELECTRONICS SRL 发明人 CAMINADA, CARLO;PRANDI, LUCIANO
分类号 G01C19/56 主分类号 G01C19/56
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