发明名称 MICRODEVICE FABRICATION
摘要 According to certain embodiments, systems comprising an energy source; at least one conjugate mask; a magnification device; and a fabrication material; wherein the at least one conjugate mask is disposed between the energy source and the magnification device; and wherein the fabrication material is disposed operable to the magnification device. According to other embodiments, methods and composition employing such systems.
申请公布号 EP2235746(A1) 申请公布日期 2010.10.06
申请号 EP20090700305 申请日期 2009.01.02
申请人 BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM 发明人 KAEHR, BRYAN;NIELSON, REX;SHEAR, JASON, B.
分类号 H01L21/44 主分类号 H01L21/44
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