MOLTEN SALT BATH, METHOD FOR PREPARING THE SAME, AND TUNGSTEN FILM

摘要

PURPOSE: A molten salt bath and a manufacturing method thereof, and a tungsten film are provided to achieve a tungsten film with flat surface, reduced voids, and high density and purity. CONSTITUTION: A molten salt bath comprises water of 100ppm or less and iron of 500 ppm or less. A manufacturing method of the molten salt bath comprises a step of drying a solid material for a molten salt bath, a step of melting the dried solid material to create a molten salt bath precursor(12), and a step of electrolyzing the molten salt bath precursor.